Air quality within high-yield, low-reject semiconductor manufacturing facilities is more important than ever. Particulate and corrosive gaseous contaminants have become serious problems in these facilities. Contaminants enter the facilities in a variety of ways, including outdoor ventilation systems, adjacent interior areas, and with individuals entering and exiting.
Corrosive Contaminant Risk
Sulfur-bearing gases, such as sulfur dioxide (SO2) and hydrogen sulfide (H2S), are the most common gases causing corrosion of electronic equipment. Once introduced in a data center or server room environment, these gaseous contaminants lead to deterioration of copper surfaces and silver solder used on computer circuit boards, leading to intermittent and hard failures. These forms of corrosion can cause failure by either impeding the flow of electricity or forming unintended circuit paths. Elimination of corrosive contaminants is therefore essential in maintaining data center equipment reliability.
Types of Failures
Fine particulate and Airborne Molecular Contamination (AMC) need to be carefully controlled for high-yield, low-reject semiconductor manufacturing.
Sources of AMC include:
- Chemical off gassing
- Exhaust fumes from other industries and processes
- Vehicle exhaust fumes
- Seasonal factors
Failures due to AMCs are classified as:
- Mechanical effects, including obstruction of cooling airflow, interference of moving or optical parts, and deformation of surfaces
- Chemical effects, including corrosion of electrical components, due to dust comprised of sulfur and chlorine bearing salts
- Electrical effects, including impedance changes and electronic circuit conductor bridging
Optimize Your Environment
Gas-phase filtration is recommended for these facilities. Blowers at air inlets, fitted with particulate and gas-phase filters, can be used to fill the facility with clean air and pressurize it to prevent contaminated outdoor air from leaking inside. The air in the facility can be recirculated through gas-phase filters to remove contaminants that are generated within.
Using SAAF™ Tech Tools, a decision science solution program for configuring gas-phase applications, AAF experts can identify optimal media and equipment solutions. SAAF Tech Tools simplifies the complexities surrounding gas-phase applications through a guided problem solving experience.
A thorough air filter audit of your HVAC Systems is the first step that AAF takes in order to provide you with professional guidance and analysis for cost savings and risk reduction. By conducting this audit, we will be able to understand your current state and then utilize SAAF Tech Tools and TCO Diagnostic,® advanced analytical software tools, to identify how you can improve air quality, energy savings, and operational flexibility while reducing failures and total cost of ownership.